Automatic Door Opener™ (ADO) – FOUP Load Port
300 mm Wafer FOUP Load Port with Proven HVM Wafer Handling Performance
Feature
- FOUP door opener Preventive Maintenance Not Required
- Lubrication free lead screw and bearings
- Alignment of door and advance plate not required
- FOUP Load Port Fully compatible with all SEMI Standard FOUPs
- DSP controlled electro-mechanical/pneumatic closed-loop servos for precise repeatable motion
- Smooth pod advance with precision motion
- SEMI Complaint, RoHS Complaint and CE Certified
- Class 1 Cleanliness
- Options
- Wafer mapping with Kensington’s proven Through-Beam technology
- Scanners: RFID; IRID; Barcode; OCR
- AMHS Options
- Programmable lights and buttons
Contact Kensington today for technical details and to obtain a quotation