Automatic Door Opener™ (ADO) – FOUP Load Port

300 mm Wafer FOUP Load Port with Proven HVM Wafer Handling Performance

Feature

• FOUP door opener Preventive Maintenance Not Required
  • Lubrication free lead screw and bearings
  • Alignment of door and advance plate not required
• FOUP Load Port Fully compatible with all SEMI Standard FOUPs
• DSP controlled electro-mechanical/pneumatic closed-loop servos for precise repeatable motion
• Smooth pod advance with precision motion
• SEMI Complaint, RoHS Complaint and CE Certified
• Class 1 Cleanliness
• Options
  • Wafer mapping with Kensington’s proven Through-Beam technology
  • Scanners: RFID; IRID; Barcode; OCR
  • AMHS Options
  • Programmable lights and buttons

Contact Kensington today for technical details and to obtain a quotation