Performix™ Equipment Front-End Module (EFEM)

EFEM configurable for a wide range of semiconductor substrate processing applications

EFEM Module
Equipment Front End Module
Equipment Front-End Module

Description

Performix™ EFEM is an integrated sub-system for a wide range of semiconductor process applications, and had been deployed in the following applications areas Metrology; Dry Wafer Processing; Wet Wafer Processing; Lithography; Wafer Level Packaging. The EFEM is configurable for different wafer sizes as well as different substrate shapes and formats while using the BOLTS interface.

Features

Unibody frame for simple and sturdy foundation
Configurable using Kensington full line of MultiLink Robots, Pre-Aligners and FOUP Load Ports
SEMI Complaint and CE Certified
Three sizes – 2 FOUP Wide, 3 FOUP Wide and 4 FOUP Wide
BOLTS interface for ADO as well as alternative substrate handling platforms
Class 1 Cleanliness
Options
- BOLTS interface for non-wafer applications
- BOLTS interface for small wafer applications
- Chemical Filtration
- AMHS Options
- Programmable lights, light tower and buttons

Contact Kensington today for technical details and to obtain a quotation

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