Custom Stages - Wafer Stages & Precision Motion Control
XYZ Stage and Rotary Stage Motion solutions customized for a wide range of applications.
Description
Kensington’s XYZ stages and rotary stages stages have addressed the needs for precision motion control, for more than a quarter century, semiconductor wafer stages and photonic device applications. In addition to standard products Kensington has delivered customized precision motion control designs for a wide range of applications.
Customized designs range from modifications of existing products to completely new designs and the integration of 3rd party components including quartz substrate and non-silicon semiconductor wafer stages.
Customization Examples
Modifications of existing product
- Top plate redesign
- Change of motor type or location
Unique integration requirements
- 100% Kensington Components
- Blended component designs
- Piezo Electric Stage integration
- Stepper Motors
- Z-Wedge for heavy payload applications
Customizes Sample Holders and Chucks
- Shape requirements
- Temperature requirements
- Sensor requirements
Frequently Asked Questions (FAQs)
What sub-micron motion stage suits semiconductor inspection tools?
Semiconductor inspection systems require motion stages that combine precision with long-term reliability. Kensington Laboratories' precision motion stages deliver sub-micron positioning accuracy, excellent repeatability, and stable performance, making them well suited for inspection, metrology, and other high-accuracy semiconductor applications.
What stage is the most accurate and reliable for my probing application?
Kensington's Precision Motion Stages are designed for applications requiring sub-micron positioning accuracy and exceptional repeatability. Their rigid, vibration-stable architecture makes them well suited for probing, metrology, inspection, lithography, and other precision semiconductor applications. Stages can also be customized to meet specific travel, payload, and integration requirements, providing reliable long-term performance in demanding production environments.