Precision Motion Control Linear Stages
Precision linear motion stages without backlash or hysteresis
Description
Kensington’s precision linear stages have addressed the needs for precision motion control for more than a quarter century. The stages are versatile and used individually, combined in X Y Stage Systems for multiple functions, and integrated to make precision multi-axis X-Y-Z-Θ stages, enabling a wide range of precision motion control applications. Kensington’s precision linear stages position substrates, silicon wafers and photonic devices, quickly with precision and repeatably.
Features
- Smooth rapid movement immune to linkage backlash
- Hysteresis and wear eliminated by non-contacting read-head design
- Real-time force-sensing with programmable soft limits for safe operation
- EMO features halts motion immediately
- System initialization not required to restart after EMO
- Quiet operation without resonances or excessive heat
- No PID parameter tuning with high step-and-settle performance via mechanical controls and design Easy to use command structure
- Resolution of 100nm, 50nm and 25nm
- Bi-directional repeatability of 200nm, 100nm and 50nm
- Acceleration: 0.001 to 0.25g
- Velocity range: 0.01 µm/s to 100 mm/s, top speed of 200 mm/sec
- Precision Linear Stage Travel Distances
- Linear– from 1″ (25 mm) to 16″ (400 mm)
- Vertical – 1″ (25 mm) Mini-Z