Precision Motion Control - The 33LR Integrated X, Y, Θ Stage
Integrated linear/rotary stage without backlash or hysteresis.
Description
Compact integrated precision motion control X, Y, Θ stage built with Kensington’s precision single axis linear stage and precision rotary stage technology. The precision xyΘ stage 33LR has linear stage X-Y travel distance of 80 mm x 80 mm with continuous 360° rotation. The precision motion control 33LR unit is used as a stand alone system or integrated with other Kensington or 3rd party precision motion control systems to address a wide range of applications requiring precision xyΘ stages.
Features
- Smooth rapid movement immune to linkage backlash
- Hysteresis and wear eliminated by non-contacting read-head design
- Real-time force-sensing with programmable soft limits for safe operation
- EMO features halts motion immediately
- System initialization not required to restart after EMO
- Quiet operation without resonances or excessive heat
- No PID parameter tuning with high step-and-settle performance via mechanical controls and design
- Resolution : Linear – 100nm, 50nm and 25nm; Rotary – 0.0003°
- Bi-directional : Linear – 200nm, 100nm and 50nm; Rotary – 0.0006°
- Acceleration : 0.001 to 0.25g
- Velocity range
- Linear – 0.01 µm/s to 100 mm/s, top speed of 200 mm/sec
- Rotary – 0.003 °/s to 200 °/s
- Straightness / Flatness – 0.75 um TIR each axis
- XY Orthogonality – 0.0015°
- XY travel distance – 80 mm x 80 mm
- Rotation – Continuos 360°