Performix™ Equipment Front-End Module

Extend the life of your EFEM Module and ensure your Performix’s reliability and exceptional throughput with service options that include:

• Detailed trouble shooting, problem resolution, repair and performance optimization
• Individual component repair: Kensington Robot; Wafer Aligner; M4000 controller
• Reconditioning services
• Recertification

Kensington’s Certificate of Conformance ensures your Kensington Performix™ EFEM is meticulously tested and returned to original operating specifications.

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